Liquid Dosing & Evaporation Systems
Total vaporization and carrier-gas evaporation
The continuous and reproducible introduction of liquid precursors into reaction zones requires specialized thermal supply systems tailored to precursor thermodynamics and process requirements.
In every design, operational parameters such as operating pressure, precise temperature management, and stringent safety concepts are rigorously accounted for to ensure robust, condensation-free operation across laboratory, pilot, and industrial scales.
Key capabilities
- Continuous total vaporization above the precursor boiling point
- Controlled carrier-gas evaporation below the boiling point
- Actively trace-heated transfer piping preventing cold spots and condensation
- Precise vapor concentration tuning, dew point control, and stoichiometry regulation
- Integrated inert gas purging, overpressure protection, and hermetic containment
- Full scale-up capability from laboratory miniplants to industrial demonstration
Technical Focus
At InVerTec, liquid feed delivery is primarily realized through two core evaporation concepts supported by rigorous process safety engineering:
- Total Vaporization: Liquid precursors are metered continuously into an electrically heated evaporator operating above the boiling point. The fully vaporized stream is transferred into the reactor via actively trace-heated piping, reliably preventing cold spots and premature condensation.
- Carrier-Gas Evaporation: An auxiliary gas stream (such as N₂ or Ar) passes through an evaporator operated below the boiling point to become uniformly loaded with precursor vapor. This method allows precise concentration tuning, lowers the dew point, and ensures accurate control over gas-phase stoichiometry.
- Pressure, Thermal & Safety Architecture: Operational parameters including operating pressure, precise temperature management, and stringent safety concepts—such as inert gas purging, overpressure protection, and hermetic containment—are systematically integrated into every unit.
Achievements
InVerTec engineers and scales these evaporation platforms across the complete development trajectory—from laboratory feasibility and miniplants up to industrial demonstration scale. A proven industrial reference (TRL 8) is our automated carrier-gas evaporation system developed for continuous titanium-precursor dosing, successfully integrated directly into commercial container glass production lines.
