Silane Supply System

The safe and precise handling of highly reactive process gases places stringent demands on system design and engineering. For research and development activities involving pyrophoric monosilane (SiH₄), InVerTec operates a specially designed gas supply system equipped with comprehensive safety monitoring and automated flow control.

Key capabilities

• Dedicated safety gas cabinet for pyrophoric monosilane handling
• Precise, reproducible gas delivery via Mass Flow Controllers (MFCs)
• Continuous leak detection with sensor evaluation units and visual alarms
• Integrated nitrogen supply for system purging and inerting
• Pre-operation leak testing capability using forming gas
• Direct, hermetic coupling to experimental CVD and coating reactors

Technical Focus

• Dedicated Silane Gas Cabinet & Flow Control: At the core of the system is a dedicated silane gas cabinet incorporating advanced gas flow control and safety technology, where Mass Flow Controllers (MFCs) ensure precise and reproducible delivery of the process gas.
• Continuous Hazard & Leak Monitoring: A continuous monitoring system featuring gas leak detectors, sensor evaluation units, and visual alarm indicators enables the early detection of potential hazards associated with handling pyrophoric monosilane.
• Purging & Forming Gas Leak Testing: An integrated nitrogen supply for inert purging and the capability to perform rigorous leak testing using forming gas further enhance the system’s safety concept prior to process operation.

Achievements

Foundation for Silicon Coating & Advanced Materials: The system provides a controlled and reliable monosilane supply for InVerTec’s experimental reactor platforms (such as fluidized bed and cold-wall IR reactors), establishing the technical foundation for advanced CVD coating processes and the synthesis of innovative silicon-based materials.